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MicroTool

MicroTool Technology

MicroTool’s products are used to increase silicon yield and equipment uptime by improving critical wafer handling techniques. MicroTool has spent years developing equipment to measure and analyze robot, load port, and other fab automation. These systems turn the ‘art-of-alignment’ into a repeatable and measurable science.

LP-3004

300mm Load Port Checker with AMHS Compatibility

Presenting the next generation for aligning and checking your load ports! Used as an inspection tool, the LP-3004 can quickly determine if your load ports are within specification. Used as an alignment tool, the LP-3004 will reduce the setup time and improve your accuracy by providing non-subjective and precise indications of optimal load port alignment. The LP-3004 inspects 16 parameters for load port alignment. The “real-time” display screens allow for fast, accurate load port setups, while on-screen instructions guide the technician through adjustments. “Report Card” screens provide for quick and easy inspections, minimizing operator errors.

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EL-Series

Next Generation Electronic Wafer Level

Keep all of your equipment “On the Level” with MicroTools’ electronic level wafer.

Equal to the weight of a silicon wafer, the versatile tool design enables use on end effectors and wafer handling blades as well as in wafer cassettes and quartz boats. The simple-to-use display allows the user to level to earth or your user-defined reference plane. Intuitive graphics and touch screen simplify operation, while the remote real-time display is convenient for remote adjustments.

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EL-Series

Next Generation Electronic Spot Level

Soon to be the most used item in your toolkit. Keep all of your equipment “On the Level” with the MicroTools’ electronic spot level. Designed as a versatile electronic level, this “spot” level can quickly check the level at 0 degrees, 90 degrees, and 180 degrees. A mounting-hole design can be used to attach the EL-5003 to your reference surface or substrate. The simple-to-use display allows you to level to earth or your user-defined reference plane. Intuitive graphics and touch screens simplify operation, while the remote real-time display is convenient for making equipment adjustments.

RC-3003/RC-2005

300mm Robot Alignment Tool

Take the guesswork out alignments! MicroTools’ ALIGN™ series of alignment tools provide a fast, repeatable and highly accurate method of aligning your wafer handling equipment — from wafer sorters and inspection tools to cluster tools and equipment front ends. Increase your yield and throughput through more accurate alignments while saving up to 75% of the time required by “eyeball” alignments. The RC-3003 Robotic Alignment Tool uses optical non-contact measurement sensors to analyze robotic motion. The motion of the wafer is characterized in slots 1-5 and 21-25 in five axes: X, Y, Z, RX, and RY. Using on-screen instructions and “real-time” graphical displays, the technician can make accurate adjustments to the machine setup. Numerical readouts provide statistical analysis, while Pass/Warn/Fail labels allow for fast, simple inspection of robots.

200mm Robot Alignment Tool

Stop “eyeball” alignments! MicroTools’ ALIGN™ series of alignment tools provide a fast, repeatable, and highly accurate method of aligning your wafer handling equipment. Versatile software in the RC-2005 aligns a range of wafer handlers. Save your wafers and save your time! The RC-2005 Robotic Alignment Tool uses optical non-contact measurement sensors to analyze robotic motion. The motion of the wafer is characterized by five different degrees of freedom: X, Y, Z, RX, and RY. Using on-screen instructions and “real-time” graphical displays, the technician can make accurate adjustments to the machine setup. Numerical readouts provide statistical analysis, while Pass/Warn/Fail labels allow for fast, simple inspection of robots.

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CF-Series

Carbon Fiber Dummy Wafers

Set up and cycle test your equipment without breaking silicon wafers. This high-tech carbon fiber composite wafer is virtually indestructible and is manufactured to SEMI-standard diameter, flatness and notch specifications. Carbon fiber dummy wafers are also designed to mimic the weight and structural characteristics of silicon wafers. Do you have a special application? We can design the wafer to meet your custom specifications! Some of the possible options are: custom artwork, holes, oversized and undersized wafer diameter.

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Do You Have Questions?

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+49 89 35 09 578 -0

Joos Hanssen

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