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Process & Services

Ald Process

 

Automation and Service

  • Automation auditing and calibration of your fab → EURIS

 

Backend

  • Curing → LAMBDA Technologies

 

Clean room & Consumables

  • Vacuum chamber cleaning products (Diamond scrubpads, micro sponge, ultraclean wipers) → EURIS DSP
  • Cost effective single wafer box → EURIS
  • New, used and factory overrun, wafer handling products → Electronic Container Company
  • Vibration control and isolation → TMC
  • Slurries and polishing → Universal Photonics
  • Wafer dicing and surface cleaning solutions → UDM Systems
  • Cost effective CMP polish rings → EURIS

 

Cleaning

  • Vacuum chamber cleaning products (Diamond scrubpads, micro sponge, ultraclean wipers) → EURIS DSP
  • Megasonic cleaning equipments → Micro-Tech

 

Drying process

  • CO2 supercritical point dryers → Tousimis

 

Metrology & Control

  • Resistivity, metal thickness, P/N measurement and sorting → Napson
  • Resistivity probes, resistivity measurement → Jandel
  • Thickness, roughness and geometry measurement → Nano System
  • Submicrometer flatness measurement → Corning Tropel
  • Load port checker, Robot calibration tools → Brooks-Microtool
  • Emulator E84, IR Tranceiver, Vibration tester → Get Control
  • Vibration control → TMC

 

Photo mask processing

 

Polishing / CMP

  • CMP Systems → Okamoto
  • Chemical delivery and recovery systems → Micro-Tech
  • Slurry equipment supply tank → EURIS

 

Wafer processing