Processes & Services

ALD Process

Information about ALD

Automation and Service

  • Automation auditing and calibration of your fab → EURIS
  • Emulator E84, IR Transceiver, Vibration tester → Get Control

Backend

  • Curing → LAMBDA Technologies

Cleanroom & Consumables

Cleaning

  • Vacuum chamber cleaning products (Diamond Scrub Pads, microsponge, ultraclean wipers) → EURIS DSP
  • Megasonic cleaning equipment → Micro-Tech

Drying process

  • IPA Vapor Drying or Marangoni Drying, no Watermarks→ Micro-Tech
  • Standalone or integrated with wet process bench. → Micro-Tech

Metrology & Control

  • Resistivity, Sheet Resistance, Flatness, Thickness, P/N Type judgment, and Wafer Sorting → Napson
  • Resistivity probes, resistivity measurement → Jandel
  • High Quality 3D Surface Metrology → FRT
  • Thickness, roughness, and geometry measurement → NanoSystem
  • Submicrometer flatness measurement → Corning Tropel
  • Emulator E84, IR Transceiver, Vibration tester → Get Control
  • Vibration Control & Isolation →  K&S

Photomask processing

Polishing / CMP

  • CMP Systems → Okamoto
  • Chemical delivery and recovery systems → Micro-Tech
  • Slurry equipment supply tank → EURIS

Wafer processing