EURIS – Diamond Scrub Pads

Diamond Scrub Pads – New Generation

The Diamond Scrub Pad (DSP) is a new scrubbing-tool generation, developed for Preventive Maintenance Cleanings of Semiconductor vacuum equipment. It is a semiconductor proof, chemical-free method and is a suitable alternative to any chemical cleaning method as it presents a healthier and more environmental-friendly protection cleaning method.
Our special Diamond Scrub Pads allow cleaning of all kinds of wafer-processing chambers as well as the cleaning of Implanter and Implanter-parts and for CVD, Etch, ALD, and Sputter tools.
As pure diamonds are equally distributed on a polyamide film (Mylar) and its surface roughness is controlled, it allows for a smoother cleaning of precision deposition systems and is ideal for removing polymers.
With this new cleaning method, the cleaning of the chambers will be more efficient and reduce the downtime of the machines. That also results in: No damage, No contamination, No particles.

The Diamond Scrub Pads are produced by EURIS in France and available in different diamond sizes and pad shapes.

Typical pads for cleaning Semiconductor equipment.

  • Dimensions 60x90mm or Ø 89mm.
  • To be used with handle, for smooth and uniform surface cleaning.
    Diamond Pad is connected by „hook-loop“ to handle.
  • Or to be used manually, with foam back.

Variety of grit sizes to suit scrub-cleaning process

  • Selection of the grit to the part to be cleaned depending on application
  • From Fine to Coarse scrub

Application Chart

Genereal Specifications

Composition: Diamond abrasive aggregate free

Substrate: Low particle emission PET film – Mylar

Pad Shape: 60x90mm or ø 90mm

Diamond Sizes: 6µm, 12µm, 35µm, 80µm

Bonding: Acrylate type structured by PET

Back side: Loop or PE hydrophobic foam


Application Fields:

Dry Etch:
Chamber cleaning, Polymer removal, surface roughness control, parts cleaning, ceramic and quartz part cleaning.

Source cleaning, parts cleaning, surface control, bushing cleaning, polymer removal

Chamber cleaning, parts cleaning, surface control, ceramic parts cleaning, quartz cleaning

Surface control, chamber cleaning, parts cleaning.