MT Systems Inc.
Best solutions for semiconductor wet-bench and drying
equipment, from manual up to fully automated.
Microtech Systems is specialized on all kind of wet-bench equipment. Cleaning, etching, chemical-distribution, drying, surface preparation, stripping, electroplating, texturing. Simple manual wet systems, fume-hoods, semi and fully automated systems, spray cleaning, tube-washers, chemical dispense units, megasonic, concentration monitoring.
Wetbenches / Wet Process Systems:
- Vortex Series:
Intelligent,Fully automated Process System
- Orca Series:
Wet Process Systems, automated
- Stingray series:
Processing Systems, Semi-automated
- Otter Series:
Acid Station, manual
- IPA Vapor Drying or Marangoni Drying, no Watermarks.
- Standalone or integrated in wet process bench.
Tubewasher, Vertical / Horizontal:
- Tube cleaners for horizontal stack furnaces,
also called horizontal tube-washer.
- Vertical spray cleaners for furnace tube cleaning, quartz tube and rod etching.
Very suitable to condition quartz for fiber pulling. Also available with replaceable cassettes, for high throughput time.
- Vertical-washer as spray- or rinse model available.
Chemical Dispense Systems:
- Available with single and dual drum systems
- Tracking and exact metering
- Glovebox solutions for toxic chemicals
- MT-500, MT-1000, MT-2000, MT-4000
- Waste collection
Do You Have Questions?
Feel free to give us a call:
+49 89 35 09 578 -0