Micro-Tech
Factory Mutual FM-4910
Micro-Tech Systems Inc.
Best solutions for semiconductor wet-bench and drying equipment, from manual usage up to fully automated process.
Microtech Systems is specialized in all kinds of wet bench equipment. Equipment available for wet cleaning, etching, chemical-distribution, drying, surface preparation, stripping of coatings, electroplating, texturing, chemical dispensing, gradient dryer, and more.
From simple manual wet bench cleaning systems, fume-hoods up to semi and fully automated systems for semiconductor cleaning as well as spray cleaners, tube-washers for cleaning of Quartz-parts. Also available chemical dispense units, megasonic, and devices for concentration monitoring.
Wet benches / wet process systems:
- Vortex Series: Intelligent, fully automated Process System
Orca Wet Bench for acid cleaning
- Orca Series: Wet Process Systems, fully automated.
For acid cleaning as well as solvent cleaning.
Orca Wet Bench for solvent cleaning
Stingray series
- Processing Systems, Semi-automated modular wet process station
- Recirculating filtered process tank
- Programmable processing recipes
- Robotic agitation of cassettes within processing tanks
- User-friendly software with touch screen interface
- Aerodynamically designed and tested to optimize airflow
Otter Manual wet bench station for cleaning and etching
Otter Series
- Manual modular wet process station
- Recirculating filtered process tank
- Programmable processing recipes
- User-friendly software with touch screen interface
- Aerodynamically designed and tested to optimize airflow
- CO2 fire suppression system
Otter Manual station for solvents
Drying
- IPA Vapor Drying or Marangoni Drying, no watermarks.
- Standalone or integrated in wet process bench. Download data sheet:
mts_productnotegradientdryer
Tubewasher, vertical / horizontal:
- Tube cleaners for horizontal stack furnaces, also called horizontal tube-washer.
- Vertical spray cleaners for furnace tube cleaning, quartz tube and rod etching. Very suitable to condition quartz for fiber pulling. Also available with replaceable cassettes, for high throughput time.
- Vertical washer as spray or rinse model available.
Chemical Dispensing Systems:
MT Systems provides best professional Chemical Distribution Systems as well as “Chemical Delivery Systems”.
Available with single and dual drum systems
- Tracking and precise metering
- Continuously filtered recirculation
- Glovebox solutions for toxic chemicals
- MT-500, MT-1000, MT-2000, MT-4000
- Waste collection
